Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEAT TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2022-131128
Category (FI): H01L21/22,511@S,H01L21/31@B,H01L21/324@R,H10P14/60,101@B,H10P32/00,201@S,H10P95/90,101@R
Stage: Grant (IP right document published.)
Filing Date: Aug. 19, 2022
Publication Date: March 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
