Japan, Sept. 16 -- MITSUTOYO CORP has got intellectual property rights for 'HETERODYNE LIGHT SOURCE FOR USE IN METROLOGY SYSTEM.' Other related details are as follows:
Application Number: JP,2022-137191
Category (FI): G01B9/021,G01B9/02002,G01B11/24@D,G01B9/02003
Stage: PROBLEM TO BE SOLVED: To solve the problem that workpiece quality management is becoming more demanding in terms of throughput, measurement resolution, and accuracy.SOLUTION: A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Aug. 30, 2022
Publication Date: March 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
