Japan, March 5 -- NGK SPARK PLUG CO LTD has got intellectual property rights for 'HOLDING DEVICE.' Other related details are as follows:
Application Number: JP,2025-102336
Category (FI): H01L21/302,101@G,H01L21/31@C,H01L21/68@R,H02N13/00@D,H10P14/60,101@C,H10P50/20,101@G,H10P72/70,H10P72/72
Stage: PROBLEM TO BE SOLVED: To provide a holding device capable of improving a processing speed in an outer peripheral area of a target to be held.SOLUTION: In an electrostatic chuck 1 comprising a tabular member 10, a base member 20 and a junction layer 30 joining the tabular member 10 and the base member 20, the tabular member 10 includes an inside part 10a in a central part in a surface direction and an outside part 10b in an outer peripheral part in the surface direction. The junction layer 30 includes a first junction layer 30a, which is disposed between the inside part 10a of the tabular member 10 and the base member 20, and a second junction layer 30b which is disposed between the outside part 10b of the tabular member 10 and the base member 20. A total value of thermal resistance in the outside part 10b of the tabular member 10 and thermal resistance in the second junction layer 30b is smaller than a total value of thermal resistance in the inside part 10a of the tabular member 10 and thermal resistance in the first junction layer 30a.SELECTED DRAWING: Figure 2 (Grant)
Filing Date: June 18, 2025
Publication Date: Oct. 1, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
