Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INFORMATION PROCESSING APPARATUS, MACHINE DIFFERENCE IDENTIFICATION METHOD, AND THERMAL TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2023-013092
Category (FI): H01L21/02@Z,H01L21/31@E,H10P14/60,101@E,H10P95/00,101,H10P95/00,102@A,H10P95/00,102@C,H10P95/00,102@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 31, 2023
Publication Date: Aug. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.