Japan, Jan. 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INFORMATION PROCESSING APPARATUS, PROGRAM, AND PROCESS CONDITION OPTIMIZATION METHOD.' Other related details are as follows:
Application Number: JP,2022-117385
Category (FI): C23C16/52,G06F16/24,H01L21/302,101@G,H01L21/31@B,H10P14/60,101@B,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 22, 2022
Publication Date: Feb. 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
