Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION DEVICE AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-056610
Category (FI): H01L21/66@X,H01L27/144@Z,H10F39/10@Z,H01L21/66@B,G01R31/26@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 30, 2022
Publication Date: Oct. 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
