Japan, Jan. 21 -- TOKYO SEIMITSU CO LTD has got intellectual property rights for 'INSPECTION DEVICE AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2021-145977
Category (FI): G01R31/28@K,H01L21/66@X,H01L27/146@Z,G01R31/26@F,G01R31/308,G01R31/3181,H01L21/66@B,H10P74/00,101@X,H10P74/00@B,H10F39/12@Z
Stage: Grant (IP right document published.)
Filing Date: Sept. 8, 2021
Publication Date: March 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.