Japan Intellectual Property Rights: INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION

Japan, Jan. 21 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION.' Other related details are as follows:

Application Number: JP,2024-119178

Category (FI): H10P14/60,101@C,C23C16/455,H01L21/302,101@G,H01L21/302,101@C,H01L21/31@C,H10P50/20,101@C,H10P50/20,101@G

Stage: Grant (IP right document published.)

Filing Date: July 25, 2024

Publication Date: Oct. 23, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.