Japan, Oct. 21 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'ION BEAM EXTRACTION ELECTRODE, ION IMPLANTATION DEVICE AND ION IMPLANTATION METHOD.' Other related details are as follows:
Application Number: JP,2023-138450
Category (FI): H01J37/08,H01J37/09@A,H01J37/317@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 28, 2023
Publication Date: March 12, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
