Japan, Sept. 16 -- EBARA CORP has got intellectual property rights for 'LEAK DETECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-197786
Category (FI): C25D17/06,C25D17/06@Z,C25D21/12@C,G01M3/06@G
Stage: PROBLEM TO BE SOLVED: To improve leak detection in a substrate holder in a plating device.SOLUTION: There is provided a method of detecting a leak in a substrate holder in a plating device, including putting a substrate holder holding a substrate into a tank filled with a liquid, feeding gas into the inner space of the substrate holder sealing the outer periphery of the substrate, imaging the liquid present on the periphery of the substrate holder while the inner space of the substrate holder is in a state of being pressurized by the gas, and analyzing one or more images having been imaged to determine the presence or absence of a bubble in the liquid to detect a leak in the substrate holder.SELECTED DRAWING: Figure 2A (Grant)
Filing Date: Dec. 12, 2022
Publication Date: June 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
