Japan, March 5 -- PERSIMMON TECHNOLOGIES CORP has got intellectual property rights for 'LINEAR ROBOT HAVING DUAL LINK ARM.' Other related details are as follows:
Application Number: JP,2024-184668
Category (FI): B25J5/00@E,H01L21/68@A,H10P72/30@A,B25J13/00@A
Stage: PROBLEM TO BE SOLVED: To provide a robot capable of extending and contracting by rotating a dual link arm and at the same time moving a linear transport mechanism along a straight path.SOLUTION: A robot includes a robot drive portion 38 and a robot arm 36 having a dual link arm. The dual link arm has a first link 90 connected to the robot drive portion, and a second link 92 forming an end effector for supporting a substrate. The robot arm extends or contracts simultaneously as the linear transport mechanism moves along the linear path. The controller moves the end effector in and out of a substrate process chamber or substrate holding area while both the linear transport mechanism and the dual link arm move by adjusting the non-translational movement of the end effector along a path that passing through an entrance of the substrate process chamber and curves with respect to the entrance of the substrate process chamber, and the translational movement of the end effector from the entrance into the substrate process chamber.SELECTED DRAWING: Figure 3B (Grant)
Filing Date: Oct. 21, 2024
Publication Date: Jan. 28, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
