Japan Intellectual Property Rights: MANAGEMENT DEVICE, MANAGEMENT METHOD, AND WAFER MANUFACTURING SYSTEM

Japan, March 24 -- SUMCO CORP has got intellectual property rights for 'MANAGEMENT DEVICE, MANAGEMENT METHOD, AND WAFER MANUFACTURING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-120955

Category (FI): B24B1/00@A,B24B37/013,B24B37/08,G05B19/418@Z,H01L21/02@Z,H01L21/304,622@R,H01L21/304,622@S,H10P52/00@U,H10P52/00@V,H10P95/00,201@Z

Stage: Grant (IP right document published.)

Filing Date: July 28, 2022

Publication Date: Feb. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.