Japan Intellectual Property Rights: MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND MANUFACTURING APPARATUS

Japan, Oct. 15 -- SUMITOMO ELECTRIC DEVICE INNOVATIONS INC has got intellectual property rights for 'MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND MANUFACTURING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-041242

Category (FI): B05C11/08,B05C9/14,G03F7/38,501,H01L21/30,564@D,H01L21/30,566,H01L21/30,567,H10P76/00,564@D,H10P76/00,566,H10P76/00,567

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 15, 2023

Publication Date: Sept. 30, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.