Japan, March 24 -- TOHOKU UNIV,COATECH CO LTD,SEINAN KOGYO KK,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY has got intellectual property rights for 'MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-099303
Category (FI): C23C16/24,H10P50/24,H10P50/20,101@H,H10P14/24,H01L21/205,H01L21/302,101@H
Stage: Grant (IP right document published.)
Filing Date: June 21, 2022
Publication Date: Jan. 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
