Japan Intellectual Property Rights: MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Japan, Jan. 21 -- CANON INC has got intellectual property rights for 'MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:

Application Number: JP,2021-201173

Category (FI): H10P76/00,600,G01B11/00@H,H01L21/30,502@Z,H01L21/30,502@D,G03F9/00@H

Stage: Grant (IP right document published.)

Filing Date: Dec. 10, 2021

Publication Date: June 22, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.