Japan, Feb. 27 -- DAIKIN IND LTD has got intellectual property rights for 'MEMBER, METHOD FOR PRODUCING MEMBER AND SEMICONDUCTOR PRODUCTION-RELATED DEVICE.' Other related details are as follows:

Application Number: JP,2025-023580

Category (FI): B32B9/00@Z,C23C26/00@C,H01L21/02@Z

Stage: PROBLEM TO BE SOLVED: To provide a member excellent in chemical resistance, a method for producing the member and a semiconductor production-related device.SOLUTION: There is provided a member in which at least a part of the surface of a material (a) is laminated with a carbon material, wherein the member is at least one selected from the group consisting of a building material member, a mobility member, an aerospace member, a semiconductor member and an information communication member.SELECTED DRAWING: None (Grant)

Filing Date: Feb. 17, 2025

Publication Date: Sept. 9, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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