Japan, Oct. 15 -- APPLIED MATERIALS INC has got intellectual property rights for 'METHOD FOR FABRICATING CHAMBER PARTS.' Other related details are as follows:
Application Number: JP,2023-068937
Category (FI): H05H1/46@M,H10P14/60,101@C,H10P50/20,101@G,H10P50/20,101@L,C23C24/08@C,H01L21/302,101@L,H01L21/31@C,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 20, 2023
Publication Date: Aug. 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.