Japan, July 1 -- DAIKIN IND LTD,UNIV OF TOKYO has got intellectual property rights for 'METHOD FOR MANUFACTURING THIN FILM.' Other related details are as follows:
Application Number: JP,2024-141840
Category (FI): H10P14/43,H01L21/285@C,C23C16/14
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 23, 2024
Publication Date: March 7, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
