Japan, Jan. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'METHOD FOR POLISHING SUBSTRATE PLACEMENT TABLE AND SUBSTRATE PLACEMENT TABLE.' Other related details are as follows:
Application Number: JP,2025-003586
Category (FI): H01L21/68@N,H10P72/72,H10P72/70,B24B7/24@Z,H01L21/68@R
Stage: Grant (IP right document published.)
Filing Date: Jan. 9, 2025
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
