Japan Intellectual Property Rights: METHOD FOR PREPARING CERIA NANOPARTICLES FOR SEMICONDUCTOR CMP PROCESS USING LIQUID PHASE PRECIPITATION AT ROOM TEMPERATURE

Japan, Sept. 18 -- UNIV HANNAM INST IND ACAD COOP FOUND has got intellectual property rights for 'METHOD FOR PREPARING CERIA NANOPARTICLES FOR SEMICONDUCTOR CMP PROCESS USING LIQUID PHASE PRECIPITATION AT ROOM TEMPERATURE.' Other related details are as follows:

Application Number: JP,2024-228542

Category (FI): C09K3/14,550@D,C09G1/02,H10P52/00@F,C01F17/235,H10P52/40,H01L21/304,622@B,H10P52/00

Stage: PROBLEM TO BE SOLVED: The present invention relates to a method for preparing ceria nanoparticles.SOLUTION: The present invention relates to a method for preparing ceria nanoparticles, comprising the steps of: (a) preparing a first mixture by stirring a ceria precursor and distilled water; (b) adding a basic catalyst to the first mixture and then stirring to obtain a precipitate; (c) washing the precipitate and then drying; and (d) heat-treating the dried precipitate to prepare ceria nanoparticles.SELECTED DRAWING: Figure 3 (Grant)

Filing Date: Dec. 25, 2024

Publication Date: April 28

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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