Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'METHOD FOR SUPPLYING LIQUID RAW MATERIAL AND GAS SUPPLY SYSTEM.' Other related details are as follows:
Application Number: JP,2022-150499
Category (FI): C23C16/448,H01L21/31@C,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 21, 2022
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
