Japan Intellectual Property Rights: METHOD OF PLASMA ETCHING

Japan, June 10 -- SPTS TECHNOLOGIES LTD has got intellectual property rights for 'METHOD OF PLASMA ETCHING.' Other related details are as follows:

Application Number: JP,2022-171258

Category (FI): H10P50/20,101@C,H10P50/20,105@A,H10P50/24,H10P50/26,H01L21/302,101@C,H01L21/302,105@A,H05H1/46@L

Stage: Grant (IP right document published.)

Filing Date: Oct. 26, 2022

Publication Date: June 8, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.