Japan, April 22 -- APPLIED MATERIALS INC has got intellectual property rights for 'METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOE A SUBSTRATE.' Other related details are as follows:
Application Number: JP,2023-193392
Category (FI): G05D23/19@Z,H01L21/68@N,H05B3/00,310@C,H05B3/00,310@D,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 14, 2023
Publication Date: March 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
