Japan, Oct. 21 -- ASML NETHERLANDS BV has got intellectual property rights for 'METROLOGY METHOD FOR MEASURING EXPOSED PATTERN AND ASSOCIATED METROLOGY APPARATUS.' Other related details are as follows:
Application Number: JP,2025-011303
Category (FI): G03F9/00@H,H10P74/20@J,G01B11/02@Z,H01L21/66@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 27, 2025
Publication Date: April 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
