Japan, Sept. 18 -- HORON:KK has got intellectual property rights for 'MULTI-BEAM IMAGE GENERATING DEVICE AND MULTI-BEAM IMAGE GENERATING METHOD.' Other related details are as follows:
Application Number: JP,2025-185265
Category (FI): H01J37/28@B,H01J37/20@D,H01J37/22,502@H
Stage: PURPOSE: To acquire image information by irradiating a sample with a plurality of primary electron beams, to synthesize the image information into one image, and to acquire the image at high speed, in a multibeam image generation device and a multibeam image generation method.CONSTITUTION: This device is provided with an interferometer for measuring the position in the moving direction and the position in the orthogonal direction of a sample in real time, a correcting means for correcting the moving amount and the rotating amount of a stage on which the sample is mounted based on the output of the interferometer, and a synthesizing means for irradiating the sample with a plurality of secondary electron beams and synthesizing one image based on acquired image information.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Nov. 4, 2025
Publication Date: Jan. 23
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
