Japan, Sept. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'OBSERVATION DEVICE, OBSERVATION METHOD, AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2023-087514
Category (FI): G01N21/956@A,H01L21/304,601@B,H10P95/60@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 29, 2023
Publication Date: Dec. 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
