Japan, March 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PARTICLE SUPPRESSION METHOD.' Other related details are as follows:
Application Number: JP,2021-169717
Category (FI): C23C16/34,C23C16/44@J
Stage: Grant (IP right document published.)
Filing Date: Oct. 15, 2021
Publication Date: April 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
