Japan, April 22 -- KIOXIA CORP has got intellectual property rights for 'PIPING, SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2022-134410
Category (FI): H10P14/60,101@C,H01L21/31@C,C23C16/44@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 25, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.