Japan, Jan. 20 -- NIHON KOSHUHA CO LTD has got intellectual property rights for 'PLASMA GENERATION DEVICE AND PLASMA GENERATION METHOD.' Other related details are as follows:
Application Number: JP,2024-063972
Category (FI): C23C16/27,H10P14/60,101@C,H10P14/24,H05H1/46@B,H01L21/31@C,H01L21/205,C23C16/511
Stage: Grant (IP right document published.)
Filing Date: April 11, 2024
Publication Date: Oct. 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
