Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS, ELECTROSTATIC CHUCK, AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2023-012673
Category (FI): H01L21/68@R,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 31, 2023
Publication Date: Aug. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
