Japan, March 3 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND ABNORMAL DISCHARGE CONTROL METHOD.' Other related details are as follows:
Application Number: JP,2022-131484
Category (FI): H01L21/302,101@G,H01L21/302,101@R,H05H1/46@M,H10P50/20,101@G,H10P50/20,101@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 22, 2022
Publication Date: Aug. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
