Japan, March 3 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND COIL HOLDER OF ANTENNA FOR PLASMA EXCITATION.' Other related details are as follows:
Application Number: JP,2022-154055
Category (FI): H05H1/46@L,H01L21/302,101@C,H10P50/20,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 27, 2022
Publication Date: April 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
