Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND INNER CHAMBER.' Other related details are as follows:
Application Number: JP,2025-008404
Category (FI): H01L21/302,101@B,H01L21/302,101@G,H05H1/46@M,H10P50/20,101@B,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 21, 2025
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
