Japan, Oct. 7 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF FINE STRUCTURE.' Other related details are as follows:
Application Number: JP,2022-154382
Category (FI): H10P50/20,105@B,H10P50/26,H10P50/20,101@C,H01L21/302,105@B,H01L21/302,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 28, 2022
Publication Date: April 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
