Japan, March 3 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-163154
Category (FI): H01L21/302,101@G,H01L21/68@R,H10P50/20,101@G,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 11, 2022
Publication Date: July 10, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
