Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-175083
Category (FI): H05H1/46@M,H05H1/46@R,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 17, 2025
Publication Date: Jan. 27
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
