Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-064956
Category (FI): H05H1/46@R,H05H1/00@A,H05H1/46@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 11, 2022
Publication Date: Oct. 23, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
