Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-120799
Category (FI): C23C16/505,H01L21/205,H01L21/302,101@G,H01L21/31@C,H05H1/46@M,H10P14/24,H10P14/60,101@C,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: July 28, 2022
Publication Date: Feb. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
