Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2024-005811
Category (FI): H01L21/68@A,H01L21/302,101@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 18, 2024
Publication Date: Feb. 28, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
