Japan, Oct. 15 -- DISCO CORP has got intellectual property rights for 'POLISHING APPARATUS AND POLISHING METHOD.' Other related details are as follows:
Application Number: JP,2022-163753
Category (FI): B24B37/10,B24B57/02,H10P52/40,H10P52/00@T,B24B37/00@K,H01L21/304,621@D,H10P52/00@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 12, 2022
Publication Date: April 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
