Japan, Oct. 21 -- DISCO CORP has got intellectual property rights for 'POLISHING DEVICE AND METHOD FOR POLISHING WORKPIECE.' Other related details are as follows:
Application Number: JP,2022-153682
Category (FI): H01L21/304,622@R,H10P52/40,H10P52/00@U,B24B49/14,B24B49/10,B24B37/12@D,B24B37/10,B24B37/00@K,B24B37/015
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 27, 2022
Publication Date: April 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
