Japan Intellectual Property Rights: POLISHING DEVICE AND POLISHING METHOD

Japan, Jan. 20 -- EBARA CORP has got intellectual property rights for 'POLISHING DEVICE AND POLISHING METHOD.' Other related details are as follows:

Application Number: JP,2022-046364

Category (FI): B24B49/04@Z,H01L21/304,622@R,H10P52/40,H01L21/304,622@K,H10P52/00@N,B24B37/30@E,H10P52/00@U,B24B37/013

Stage: Grant (IP right document published.)

Filing Date: March 23, 2022

Publication Date: Nov. 10, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.