Japan Intellectual Property Rights: POLISHING METHOD AND POLISHING DEVICE

Japan, June 10 -- EBARA CORP has got intellectual property rights for 'POLISHING METHOD AND POLISHING DEVICE.' Other related details are as follows:

Application Number: JP,2022-117791

Category (FI): H10P52/00@N,H01L21/304,622@K,B24B37/30@E,H10P52/40,H10P52/00@U,H10P52/00@T,H01L21/304,622@R

Stage: Grant (IP right document published.)

Filing Date: July 25, 2022

Publication Date: Feb. 6, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.