Japan, Jan. 21 -- TOKYO SEIMITSU CO LTD has got intellectual property rights for 'PRE-ALIGNMENT DEVICE AND METHOD.' Other related details are as follows:
Application Number: JP,2021-153460
Category (FI): H10P74/00@B,H01L21/66@B,H01L21/68@F,H10P72/50@F
Stage: Grant (IP right document published.)
Filing Date: Sept. 21, 2021
Publication Date: April 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.