Japan, March 3 -- ENTEGRIS INC has got intellectual property rights for 'PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS.' Other related details are as follows:
Application Number: JP,2024-063161
Category (FI): C07F7/10@E,C23C16/42
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 10, 2024
Publication Date: Aug. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
