Japan, March 5 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'PROCESSING DEVICE UNIT.' Other related details are as follows:
Application Number: JP,2022-098906
Category (FI): H10P58/00@B,H10P58/00@F,B23Q1/00@U,B24B41/06@L,B24B41/02,B23K26/53,H01L21/78@B,H01L21/78@F,B23Q1/01@G
Stage: PROBLEM TO BE SOLVED: To reduce vibration transmitted from a suction device to a processing device when the suction device is disposed in the processing device such as a grinding device.SOLUTION: A processing device unit includes: a processing device including a chuck table which suctions and holds a workpiece, and a processing unit which processes the workpiece suctioned and held by the chuck table; a suction device which supplies a negative pressure to the chuck table; a first base which supports the processing device; and a second base that supports the suction device. The second base has, at a bottom part thereof, multiple leg parts that are disposed so as to penetrate through through-holes provided in the first base without contacting with the first base, and are each capable of extending and contracting. The second base can be supported by the first base by reducing a protruding length of each of the multiple leg parts when the processing and suction devices are transported. The second base stands by itself without contacting with the first base by extending the protruding length of each of the multiple leg parts when the processing and suction devices are installed on a floor surface.SELECTED DRAWING: Figure 2 (Grant)
Filing Date: June 20, 2022
Publication Date: Jan. 5, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
