Japan Intellectual Property Rights: PROCESSING LIQUID SUPPLY DEVICE AND PROCESSING LIQUID SUPPLY METHOD

Japan, Jan. 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PROCESSING LIQUID SUPPLY DEVICE AND PROCESSING LIQUID SUPPLY METHOD.' Other related details are as follows:

Application Number: JP,2022-035302

Category (FI): B05C11/10,B05D1/26@Z,B05D3/00@B,H01L21/30,564@C,H01L21/30,569@C,H10P76/00,564@C,H10P76/00,569@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 8, 2022

Publication Date: Sept. 21, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.