Japan Intellectual Property Rights: PROCESSING METHOD AND PROCESSING DEVICE

Japan, Aug. 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PROCESSING METHOD AND PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2023-032588

Category (FI): H10P14/60,101@C,H01L21/302,101@H,H01L21/302,101@F,C23C16/44@J,H10P50/28,H10P50/26,H10P50/20,101@H,H10P50/20,101@F,H01L21/31@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 3, 2023

Publication Date: Sept. 13, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.