Japan, July 14 -- DISCO CORP has got intellectual property rights for 'PROTECTION MEMBER FORMING DEVICE.' Other related details are as follows:
Application Number: JP,2022-160231
Category (FI): H10P52/00@S,H10P72/70,H10P52/00@T,H10P52/00@M,H10P52/00@C,B24B41/06@L,H01L21/68@N,H01L21/304,631,H01L21/304,622@J,H01L21/304,622@P
Stage: PROBLEM TO BE SOLVED: To provide a protection member forming device capable of satisfactorily implementing cleaning of a glass table.SOLUTION: A liquid-state resin (M) is supplied onto a mounting surface (161) of a glass table (16) by a resin supply nozzle (183), a wafer holding part (20) is move downward by a lift mechanism (21), and the liquid-state resin is spread over the entire mounting surface of the glass table. Thereafter, the liquid-state resin is cured by an ultraviolet irradiation unit (23) and control is performed for separating a cured resin (M1), which is obtained by curing the liquid-state resin, from the mounting surface of the glass table and carrying it out by a carry-out mechanism (27). Dust (D) deposited on the mounting surface of the glass table is taken into the cured resin which is carried out of the glass table, and the mounting surface of the glass table is cleaned by carrying out the cured resin.SELECTED DRAWING: Figure 8 (Grant)
Filing Date: Oct. 4, 2022
Publication Date: April 16, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
