Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'RAW MATERIAL FEEDING DEVICE.' Other related details are as follows:
Application Number: JP,2021-146294
Category (FI): B01J7/00,B05B15/00,B05B9/00,C23C16/448,H01L21/31@B,H10P14/60,101@B
Stage: Grant (IP right document published.)
Filing Date: Sept. 8, 2021
Publication Date: March 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
